Method of using time interval in IC foundry to control feed...

Details Method of using time interval in IC foundry to control feed... Method of using time interval in IC foundry to control feed...

2005-03-08

2005-03-08

Gandhi, Jayprakash N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S095000, C700S117000, C438S005000

Reexamination Certificate

active

06865438

ABSTRACT:
An advanced process control method using time interval between lots of a particular product to control the weighting of feedback data is described. A plurality of products are fabricated wherein the products are tracked by the process control method based on product type, for example. Variation in a parameter is detected. The adjustment speed of a process recipe is determined based on a time interval weighting wherein the time interval is defined as the time between processing of lots of the same product type. The process recipe is updated at the determined adjustment speed to decrease variation of the parameter.

REFERENCES:
patent: 6245581 (2001-06-01), Bonser et al.
patent: 6248602 (2001-06-01), Bode et al.
patent: 6266144 (2001-07-01), Li
patent: 6304999 (2001-10-01), Toprac et al.

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