Method of using scanning probe microscope allowing cleaning of p

Details Method of using scanning probe microscope allowing cleaning of p Method of using scanning probe microscope allowing cleaning of p

1996-01-22

1997-07-29

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250306, 73105, H01J 3728, G01B 734

Patent

active

056524285

ABSTRACT:
A method of use of a scanning probe microscope includes the step of mounting a probe to a scanning probe microscope in ambient atmosphere, the step of drawing on a surface of a standard sample by two-dimensionally scanning while keeping constant a tunnel current under feedback control of a distance between a standard sample and the probe, the step of applying pulse voltage between the probe and the standard sample while two-dimensionally scanning, with feedback control stopped at each scanning point, the step for obtaining drawn image of the surface of the standard sample again, comparing the obtained drawn image with the drawn image obtained in the step of drawing on the surface of the standard sample thereby determining cleanness of the probe, the step of repeating the step of pulse application and the step of determination of cleanness until the probe is cleaned, the step for replacing the standard sample by a sample for measurement after cleanness of the probe is confirmed, and the step of drawing.

REFERENCES:
patent: 5038034 (1991-08-01), Fujita
patent: 5132533 (1992-07-01), Kawase
Hans-Wermer Fink, Mono-Atomic Tips for Scanning Tunneling Microscopy, IBM J. Res. Develop., vol. 30, No. 5, Sep. 1986, pp. 460-465.
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D.K. Biegelsen et al, Ion Milled Tips for Scanning Tunneling Microscopy, Appl. Phys. Lett., vol. 50, No. 11, Mar. 1987, pp. 696-698.
T. Tiedje et al, Tip Contamination Effects In Ambient Pressure Scanning Tunneling Microscopy Imaging of Graphite, J. Vac. Sci Technol. A, vol. 6, No. 2, Mar./Apr. 1988, pp. 372-375.
M. Tomitori et al, Elaboration and Evaluation of Tip Manipulation of Scanning Tunneling Microscopy, J. Vac. Sci. Technol. A, vol. 8, No. 1, Jan./Feb. 1990, pp. 425-428.
Uchida, H. et al., "Single-atom manipulation on the Si(111)7*7 surface by the scanning tunneling microscope," Surface Science, ISSN 0039-6028, May 1993, vol. 287-288, p. 1056.
Tiedje, T. et al., "Tip contamination effects in ambient pressure scanning tunneling microscopy imaging of graphite", Journal of Vacuum Science and Technology: Part A, vol. 6, No. 2, Mar. 1988-Apr. 1988, New York:U.S.
"In Situ Sharpening of Atomic Force Microscope Tips", IBM Technical Disclosure Bulleting, vol. 38, No. 2, Feb. 1995, p. 637.

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