Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-11-02
2008-12-09
Dang, Hung X. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S291000, C359S292000
Reexamination Certificate
active
07463404
ABSTRACT:
Embodiments of the present invention generally relate to a device that has an improved usable lifetime due to the presence of a lubricant that reduces the likelihood of stiction occurring between the various moving parts in an electromechanical device. Embodiments of the present invention also generally include a device, and a method of forming a device, that has one or more surfaces or regions that have a volume of lubricant disposed thereon that acts as a ready supply of “fresh” lubricant to prevent stiction occurring between interacting components found within the device. In one aspect, components within the volume of lubricant form a gas or vapor phase that reduces the chances of stiction-related failure in the formed device. In one example, aspects of this invention may be especially useful for fabricating and using micromechanical devices, such as MEMS devices, NEMS devices, or other similar thermal or fluidic devices.
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Chen Dongmin
Xiong Fulin
Dang Hung X.
Miradia Inc.
Patterson & Sheridan LLP
Tra Tuyen Q
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