Method of treating a gas stream

Details Method of treating a gas stream Method of treating a gas stream

2006-03-13

2010-06-22

Vanoy, Timothy C (Department: 1793)

Chemistry of inorganic compounds

Modifying or removing component of normally gaseous mixture

C423S24000R, C423S245100, C423S245200, C422S168000

Reexamination Certificate

active

07740815

ABSTRACT:
A method of treating a gas stream containing silane or other silicon-containing gas is described, in which the gas stream is conveyed to a liquid ring pump or screw-mechanism pump, to which are also supplied an oxidant for oxidising the silicon-containing gas within the pump, and a liquid for forming a liquid ring or intermittent flushing within the pump. A liquid stream containing said liquid and a by-product of the oxidation of the silicon-containing gas is exhaust from the pump.

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PCT Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration of International Application No. PCT/GB2006/000879; Date of mailing: Jun. 6, 2006.
PCT International Search Report of International Application No. PCT/GB2006/000879; Date of mailing of the International Search Report: Jun. 6, 2006.
PCT Written Opinion of the International Searching Authority of International Application No. PCT/GB2006/000879; Date of mailing: Jun. 6, 2006.

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