Method of three-dimensional atomic imaging

Details Method of three-dimensional atomic imaging Method of three-dimensional atomic imaging

1991-01-07

1992-03-10

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250307, H01J 3726

Patent

active

050952072

ABSTRACT:
A method of three-dimensional imaging of the atomic environment of atoms near the surface of the sample involves forming a localized source electron diffraction pattern, detecting the intensity of the distribution of the pattern, and generating data corresponding to the intensity distribution. The intensity data is normalized and corrected for a phase shift error to produce data corresponding to a hologram. The process may be repeated at a several predetermined emitted electron energies, and the data at each energy is combined to yield a composite image intensity having improved resolution. The method of the invention can provide a lenseless electron microscope having a resolution better than one angstrom and which overcomes distortions caused by multiple scattering.

REFERENCES:
patent: 4038543 (1977-07-01), Krisch et al.
patent: 4109996 (1978-08-01), Ersoy
patent: 4532422 (1985-07-01), Nomura et al.
patent: 4935625 (1990-06-01), Hasegawa et al.
patent: 4998788 (1991-03-01), Osahaba et al.
"Photoelectron Holography", Barton, Phy. Rev. Letters, vol. 61, No. 12, Sep. 1988, p. 1356-1359.

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