Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – On insulating substrate or layer
Reexamination Certificate
2004-10-12
2010-12-07
Smoot, Stephen W (Department: 2813)
Semiconductor device manufacturing: process
Formation of semiconductive active region on any substrate
On insulating substrate or layer
C257SE21463, C977S742000, C977S762000, C977S843000
Reexamination Certificate
active
07846819
ABSTRACT:
A method of synthesizing electronic components incorporating nanoscale filamentary structures in which method a metallic catalyst is deposited in a nanoporous membrane , the catalyst being adapted to penetrate in at least some of the pores of the nanoporous membrane , and filamentary structures are grown on the catalyst in at least some of the pores in the nanoporous membrane . The nanoporous membrane is prepared in a manner suitable for ensuring that the wall of the pores include a single-crystal zone, and at least part of the catalyst is grown epitaxially on said single-crystal zone.
REFERENCES:
patent: 4784973 (1988-11-01), Stevens et al.
patent: 5314569 (1994-05-01), Pribat et al.
patent: 6129901 (2000-10-01), Moskovits et al.
patent: 6346189 (2002-02-01), Dai et al.
patent: 6605535 (2003-08-01), Lee et al.
patent: 6628053 (2003-09-01), Den et al.
patent: 6855603 (2005-02-01), Choi et al.
patent: 7323218 (2008-01-01), Chen et al.
patent: 2001/0028872 (2001-10-01), Iwasaki et al.
patent: 2002/0136681 (2002-09-01), Thess Andreas et al.
patent: 2002/0158342 (2002-10-01), Tuominen et al.
patent: 2002/0192141 (2002-12-01), Little
patent: 2003/0010971 (2003-01-01), Zhang et al.
patent: 2004/0232426 (2004-11-01), Graham et al.
patent: 2005/0255581 (2005-11-01), Kim et al.
patent: 2005/0276743 (2005-12-01), Lacombe et al.
patent: 1278024 (2000-12-01), None
patent: 2 658 839 (1991-09-01), None
patent: WO02/092506 (2002-11-01), None
Kok-Keong Lew and Joan M. Redwing; “Growth characteristics of silicon nanowires synthesized by vapor-liquid-solid growth in nanoporous alumina templates”; Jul. 2003; Journal of Crystal Growth, vol. 254, pp. 14-22.
Hideki Masuda and Masahire Satoh; “Fabrication of Gold Nanodot Array Using Anodic Porous Alumina as an Evaporation Mask”; Jan. 1996; Jpn. J. Appl. Phys., vol. 35, pp. L126-L129.
H. Nakano, K. Nakahara, S.Kawano, S. Oue, T. Akiyama, and H. Fukushima; “Effect of electrolysis factors on crystal orientation and morphology of electrodeposited cobalt”; 2002; Journal of Applied Elecrochemistry, vol. 32, pp. 43-48.
J. Li, C. Papadopoulos, J. M. Xu, and M. Moskovits; “Highly-ordered carbon nanotube arrays for electronics applications”; Jul. 1999; Applied Physics Letters, vol. 75, No. 3, pp. 367-369.
R.S. Wagner and W.C. Ellis; “Vapor-Liquid-Solid Mechanism of Single Crystal Growth”; Mar. 1964; Applied Physics Letters, vol. 4, No. 5, pp. 89-90.
Wu et al., “Block-by-Block Growth of Single-Crystalline Si/SiGe Superlattice Nanowires,” Nano Letters, vol. 2, No. 2, pp. 83-86, (2002).
Kornelius Nielsch et al., “Uniform Nickel Deposition into Ordered Alumina Pores by Pulsed Electrodeposition,” Advanced Materials, vol. 12, No. 8, pp. 582-586, (2000).
Kornelius Nielsch et al., “High Density Hexagonal Nickel Nanowire Array,” Journal of Magnetism and Magnetic Materials, 249, pp. 234-240, (2002).
M. Kleinert et al., “Co Deposition on Au(111) and Au(100) electrodes: an in situ STM study,” Electrochimica Acta, 46, pp. 3129-3136, (2001).
P. Evans, “Electrodeposition of Epitaxial Nickel Films on GaAs,” Journal of Magnetism and Magnetic Materials, 260, pp. 467-472, (2003).
X. Hoffer et al., “Spin-Dependent Magnetoresistance and Spin-Charge Separation in Multiwall Carbon Nanotubes,” arXiv:cond-mat/0303314v2, 3 pages, (2003).
Preliminary French Search Report FR 0311959; report dated Jul. 30, 2004.
International Search Report PCT/FR2004/002584; report dated Mar. 22, 2005.
Sui et al., “Structure Thermal Stability, and Deformation of Multibranched Carbon Nanotubes Synthesized by CVD in the AAO Template,” Journal of Physical Chemistry, vol. 105, No. 8, pp. 1523-1527, (2001).
Knutson et al., “Reactivity of Surfaces and Imaging with Functional NSOM,” Electrochimica Acta, vol. 48, No. 20-22, pp. 3229-3237, (2003).
Pribat Didier
Wade Travis
Wegrowe Jean-Eric
Centre National de la Recherche Scientifique "CNRS"
Ecole Polytechnique
Miller Matthias & Hull
Smoot Stephen W
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