Method of synthesizing diamond-like carbon thin films

Details Method of synthesizing diamond-like carbon thin films Method of synthesizing diamond-like carbon thin films

1993-12-29

1997-10-07

King, Roy V.

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

4272555, 427249, 427122, B05D 306, C23C 1626

Patent

active

056745737

ABSTRACT:
A method for synthesizing a hard diamond-like thin film on a rotating substrate, the method comprising the steps of: generating plasma of gas containing hydrocarbon gas, in a first vacuum vessel having an inflow portion and an outflow portion for the gas such that the substrate is provided in a second vacuum vessel maintained at a pressure lower, by a factor of 10 or more, than that of the first vacuum vessel due to flow resistance of the gas between the outflow portion and the substrate; and irradiating the plasma onto the substrate by pressure difference between the first vacuum vessel and the second vacuum vessel while an AC power is being applied to a mesh-shaped internal electrode provided in the first vacuum vessel.

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