Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Removal of imaged layers
Reexamination Certificate
2006-06-13
2006-06-13
Mills, Gregory (Department: 1763)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Removal of imaged layers
C156S345320, C156S345510, C414S935000, C134S061000, C134S001200, C134S001300
Reexamination Certificate
active
07060422
ABSTRACT:
An apparatus for supercritical processing and non-supercritical processing of a workpiece comprises a transfer module, a supercritical processing module, a non-supercritical processing module, and a robot. The transfer module includes an entrance. The supercritical processing module and the non-supercritical processing module are coupled to the transfer module. The robot is preferably located within the transfer module. In operation, the robot transfers a workpiece from the entrance of the transfer module to the supercritical processing module. After supercritical processing, the robot then transfers workpiece from the supercritical processing module to the non-supercritical processing module. After the non-supercritical processing, the robot returns the workpiece to the entrance of the transfer module. Alternatively, the non-supercritical processing is performed before the supercritical processing.
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pat
Biberger Maximilian Albert
Layman Frederick Paul
Sutton Thomas Robert
Haverstock & Owens LLP
Kackar Ram N
Mills Gregory
Tokyo Electron Limited
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