Method of sputtering a mixture of hexagonal boron nitride and st

Details Method of sputtering a mixture of hexagonal boron nitride and st Method of sputtering a mixture of hexagonal boron nitride and st

1992-04-03

1993-03-09

Beck, Shrive

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419222, 148DIG34, 148DIG113, 148DIG158, C23C 1400

Patent

active

051924099

ABSTRACT:
A material for high-vacuum vessels characterized by depositing a mixture film of stainless steel and boron nitride on the surface of a metal or an alloy through the sputtering process, and heating and precipitating hexagonal boron nitride onto the surface thereof.

REFERENCES:
patent: 3564565 (1971-02-01), Haberecht
patent: 4683043 (1987-07-01), Melton et al.
patent: 4895770 (1990-01-01), Schintlmeister et al.

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