Method of shaping lithographically-produced probe elements

Details Method of shaping lithographically-produced probe elements Method of shaping lithographically-produced probe elements

2005-11-16

2008-12-09

Evans, Geoffrey S (Department: 3742)

Electric heating

Metal heating

By arc

C219S069170

Reexamination Certificate

active

07462800

ABSTRACT:
A method is provided for shaping tips of lithographically-produced probe elements configured for use in a probe card to establish electrical communication with a contact of a semiconductor device to be tested. The method includes (a) lithographically producing a plurality of probe elements and (b) using a subtractive process, such as laser ablation or micro-electro-discharge machining, to remove material from each tip of the plurality of probe elements to form each tip into a shape well adapted to penetrate a contaminant oxide layer.

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