Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2006-08-29
2006-08-29
Nguyen, Kiet T. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S306000
Reexamination Certificate
active
07098454
ABSTRACT:
A specimen for atom probe analysis is prepared by providing a slab of material from which the specimen will be taken; defining a plurality of posts in the slab by in the slab; removing at least one post from the slab; and mounting the post. The post is shaped to a tip shape suitable for use in the atom probe, such as by focused ion beam milling the post to a tip shape. Grooves are cross cut into the slab. If needed, each groove is filled with a supporting material prior to cutting a parallel or intersecting groove thereto. The invention is also defined as a source of specimens for use in atom probe sampling comprising a slab of material from which the specimen will be taken, which has been defined into a plurality of posts and from which slab at least one post is removed from the slab and mounted.
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Preparation of 3D Atom Probe Samples of Multilayered Film Structures Using a Focused Ion Beam R. L. Martens, D. J. Larson, T. F. Kelly, A. Cerezo, P. H. Clifton and N. Tabat pp. 522-523—2000.
Focused ion-beam specimen preparation for atom probe field-ion microscopy characterization of multilayer film structures D. J. Larson, D. T. Foord, A. K. Petford-Long, A. Cerezo and G. D. W. Smith pp. 45-50, May 16, 1998.
Three-dimensional atom probe feldd-ion microscopy observation of Cu/Co multilayer film structures DJ. Larson, A. K. Petford-Long, A. Cerezoand G. D. W. Smith pp. 1125-1127, vol. 73, No. 8, Applied Physics Letters, Aug. 24, 1998.
Advances in Atom Probe Specimen Fabrication from Planar Multilayer Thin Film Structures D. J. Larson, B. D. Wissman, R. L. Martens, R. J. Viellieux, T. F. Kelly, T. T. Gribb, H. F. Erskine and N. Tabat, pp. 24-31, Sep. 18, 2000.
Kuhlman Kimberly
Wishard James R.
California Institute of Technology
Dawes Daniel L.
Myers Dawes Andras & Sherman
Nguyen Kiet T.
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