Material or article handling – Process – Of emptying portable receptacle
Reexamination Certificate
2007-02-20
2007-02-20
Keenan, James (Department: 3652)
Material or article handling
Process
Of emptying portable receptacle
C414S416030, C414S416080, C414S937000, C414S941000, C414S744300, C294S907000
Reexamination Certificate
active
10244852
ABSTRACT:
A substrate handling robot includes an arm drive mechanism. A first arm is connected to the arm drive mechanism. A multiple substrate batch loader is connected to the first arm. A second arm is also connected to the arm drive mechanism. A single plane end effector is connected to the second arm. The multiple substrate batch loader produces a vacuum signal indicative of how many substrates are held by the multiple substrate batch loader. A vacuum signal interpreter alters the movement of the first arm in response to the substrate load number. An object sensor is connected to the second arm. The object sensor assesses the number of substrates in a cassette adjacent to the multiple substrate batch loader. A substrate loading sequence controller controls the first arm and the second arm in response to the number of substrates in the cassette, such that the second arm removes substrates from the cassette in such a manner as to facilitate complete loading of the multiple substrate batch loader.
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Cameron James A.
Reyling Steven G.
Brooks Automation Inc.
Keenan James
Pickreign Richard
Weingarten Schurgin, Gagnebin & Lebovici LLP
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