Method of regulating concentration and distribution of oxygen in

Details Method of regulating concentration and distribution of oxygen in Method of regulating concentration and distribution of oxygen in

1982-08-09

1984-03-13

Bernstein, Hiram H.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

C30B 1500

Patent

active

044365772

ABSTRACT:
Oxygen concentration and distribution within silicon crystal rods drawn according to the Czochralski process from silicon melt contained in a silica crucible, are regulated through variation of both the magnitude and relative sense of direction of seed and crucible rotation rates with uniform distribution of the oxygen being accomplished by increasing crucible rotation rate to preselected values as a function of crystal rod growth and melt consumption.

REFERENCES:
patent: 3929557 (1975-12-01), Goodrum
patent: 4010064 (1977-03-01), Patrick
patent: 4040895 (1977-08-01), Patrick et al.
patent: 4239585 (1980-12-01), Kohl

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