Method of reducing the effect of noise in determining the...

Details Method of reducing the effect of noise in determining the... Method of reducing the effect of noise in determining the...

2007-12-11

2007-12-11

Pham, Hoa Q. (Department: 2886)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

10794204

ABSTRACT:
A method of reducing the effect of systematic and/or random noise during determination of dependent variable values, (eg. pseudo “n” and “k” and/or ellipsometric PSI and DELTA or mathematical equivalent vs. wavelength or angle of incidence), involving selecting a mathematical function and an independent variable subset range combination so that a square error best fit with total summed square error over the independent variable subset range being minimized, zero or within an acceptable range near zero, are achieved.

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