Glass manufacturing – Processes of manufacturing fibers – filaments – or preforms – With measuring – controlling – sensing – programming – timing,...
Reexamination Certificate
2006-11-17
2009-11-10
Hoffmann, John (Department: 1791)
Glass manufacturing
Processes of manufacturing fibers, filaments, or preforms
With measuring, controlling, sensing, programming, timing,...
C065S379000, C065S384000, C065S386000, C065S429000
Reexamination Certificate
active
07614253
ABSTRACT:
A method of making optical quality films is described. A silica film is deposited on a wafer by PECVD (Plasma Enhanced Chemical Vapor Deposition). The deposited film is then subjected to a first heat treatment to reduce optical absorption, wafer warp, and compressive stress. A second film is deposited. This step is then followed by a second heat treatment to reduce optical absorption, wafer warp and tensile stress. The two heat treatments have similar temperature profiles.
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Lachance Jonathan
Ouellet Luc
(Marks & Clerk)
DALSA Semiconductor Inc.
Hoffmann John
Mitchell Richard J.
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