4. Semiconductor device manufacturing: process
  5. Making device or circuit responsive to nonelectrical signal
  6. Physical stress responsive

DALSA Semiconductor Inc.

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Fabrication of MEMS devices with spin-on glass

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Fabrication of MEMS devices with spin-on glass

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Non-single crystal – or recrystallized – material containing...
Reexamination Certificate

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Fabrication of microstructures with vacuum-sealed cavity

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Hermetic wafer-level packaging for MEMS devices with...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate

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Method of depositing a thick dielectric film

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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