Method of recording and reproducing an electron microscope image

Details Method of recording and reproducing an electron microscope image Method of recording and reproducing an electron microscope image

1986-01-14

1987-10-13

Howell, Janice A.

Radiant energy

Automatic/serial detection of similar sources

250311, 250397, G01N 2304, H01J 3724

Patent

active

047000716

ABSTRACT:
A two-dimensional image sensor such as a stimulable phosphor sheet is exposed under vacuum to an electron beam that has passed through a specimen to cause the two-dimensional image sensor to store the energy of the electron beam, then stimulating energy is applied to the two-dimensional image sensor for discharging light therefrom which represents the stored energy of the electron beam, and the light discharged from the two-dimensional image sensor is photoelectrically detected to produce an image signal. A reference image signal is also produced in a similar manner by exposing the two-dimensional image sensor to an electron beam that has not passed through the specimen. One of the first-mentioned image signal and the reference image signal is subtracted from the other per pixel to generate a difference signal, from which an electron microscope image of the specimen is reproduced.

REFERENCES:
patent: 3859527 (1975-01-01), Luckey
patent: 4206349 (1980-06-01), Kamimura
patent: 4258264 (1981-03-01), Kotera et al.
patent: 4276473 (1981-06-01), Kato et al.
patent: 4315318 (1982-02-01), Kato et al.
patent: 4380702 (1983-04-01), Takahashi et al.
patent: 4387428 (1983-06-01), Ishida et al.
patent: 4400619 (1983-08-01), Kotera et al.
patent: 4527061 (1985-07-01), Horikawa et al.

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