Method of reconstructing an image in a particle-optical apparatu

Details Method of reconstructing an image in a particle-optical apparatu Method of reconstructing an image in a particle-optical apparatu

1996-10-03

1998-05-19

Anderson, Bruce

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250311, H01J 3700

Patent

active

057539138

ABSTRACT:
A method of non-recursive reconstruction of images in a High Resolution Electron Microscope (HRTEM). In an HRTEM a series of, for example, 100 images of an object is formed with each time a different setting of the astigmatism of the imaging lens or lenses. By subjecting these images to a Fourier transformation and multiplying the transformed images by a known filter function, a reconstruction of the object electron wave function is obtained by summing of the images thus filtered and transformed; said object electron wave function no longer contains the linear information which is undesirable for the reconstruction and the non-linear information which is not negligibly small for large thicknesses of the object is no longer present either.

REFERENCES:
patent: 3971936 (1976-07-01), Hoppe
patent: 5134288 (1992-07-01), Van Dijik
patent: 5353236 (1994-10-01), Subbiah
patent: 5432347 (1995-07-01), Coene
patent: 5466937 (1995-11-01), Kruit
patent: 5523568 (1996-06-01), Ichikawa et al.
patent: 5654547 (1997-08-01), Coene et al.
"Computer Techniques for Image Processing in Electron Microscopy", by W.O. Saxton, Chapter 9-7 Object Reconstruction, pp. 236-248, Academic Press, 1978.

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