Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1993-04-15
1995-02-14
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250423P, G01N 2100
Patent
active
053897862
ABSTRACT:
The ablation threshold of a laser fluence with respect to the surface of a sample manufactured in a high vacuum chamber is determined by using the sample. The quantity of vacancy-type defects is determined by radiating a laser beam having a fluence slightly higher than the ablation threshold on the surface. At the same time, the quantities of adatom-type and kink-type defects are determined by radiating a pulsed laser beam having a fluence slightly lower than the ablation threshold on the surface repeatedly to obtain the relation between an emission yield and the number of laser pulses. The quantity of the adatom-type defects is obtained by determining the area (total quantity of emitted atoms) of a rapidly decreasing portion of the relation. The quantity of kink-type defects is obtained by determining a magnitude of an emission yield of a slowly decreasing portion of the relation.
REFERENCES:
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patent: 4740692 (1988-04-01), Yamamota et al.
patent: 4988879 (1991-01-01), Zare et al.
patent: 5138158 (1992-08-01), Ninomiya et al.
patent: 5146088 (1992-09-01), Kingham et al.
Hattori Ken
Itoh Noriaki
Nakai Yasuo
Okano Akiko
Berman Jack I.
Beyer James
President of Nagoya University
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