Method of quantitative analysis by means of the mean atomic numb

Details Method of quantitative analysis by means of the mean atomic numb Method of quantitative analysis by means of the mean atomic numb

1988-03-17

1989-07-11

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250310, G01N 23225

Patent

active

048474959

ABSTRACT:
The invention relates to an accurate method of quantitative analysis by the quantitative determination of the mean atomic number of phases containing two light elements or one light element combined with heavy elements using a scanning microscope connected to an image analyser of the intensity of the back-scattered electrons. This method of quantitative analysis by the quantitative determination of the mean atomic number (Z.sub.1) with a precision of .+-.0.1 unit of an unknown phase present in the plane micrographic section of a sample, containing either two light elements (3.ltoreq.Z.ltoreq.11) or at least one heavy element (Z>12) and a single light element (3.ltoreq.Z.ltoreq.11) using a scanning electron microscope comprising analyser X coupled to an image analyser, the image analyser allowing the local intensity of the back-scattered electrons to be measured by the level of greyness (G) of the corresponding image, this method involving, under given operation conditions:

REFERENCES:
patent: 4236178 (1980-11-01), Tiemeijer
patent: 4559450 (1985-12-01), Robinson et al.
patent: 4697080 (1987-09-01), King
"Backscattered Electrons as an Analytical Technique", R. E. Ogilve, Fourth Symposium on Electron Beam Technology, Mar. 1962.
M. D. Ball et al., Journal of Microscopy, vol. 124, Pt. 1, Oct. 1981, pp. 57-68.

Affiliated with

Also associated with

Rating

Method of quantitative analysis by means of the mean atomic numb does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of quantitative analysis by means of the mean atomic numb, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of quantitative analysis by means of the mean atomic numb will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-438858