Adhesive bonding and miscellaneous chemical manufacture – Methods – Surface bonding and/or assembly therefor
Reexamination Certificate
2005-07-19
2008-10-07
Aftergut, Jeff H (Department: 1791)
Adhesive bonding and miscellaneous chemical manufacture
Methods
Surface bonding and/or assembly therefor
C156S293000
Reexamination Certificate
active
07431788
ABSTRACT:
A method of protecting a bond layer in a substrate support adapted for use in a plasma processing system. The method includes the steps of attaching an upper member of a substrate support to a lower member of a substrate support with a bonding material. An adhesive is applied to an outer periphery of the upper member and to an upper periphery of the lower member, and a protective ring is positioned around the outer periphery of the upper member and the upper periphery of the lower member. The protective ring is originally fabricated with dimensions that provide mechanical stability and workability. The protective ring is then machined to an exact set of final dimensions consistent with the design of the substrate support application.
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International Preliminary Report on Patentability dated Jan. 22, 2008, issued in PCT Application No. PCT/US2006/027090.
Comendant Keith
Ricci Anthony
Tappan Jim
Aftergut Jeff H
Buchanan & Ingersoll & Rooney PC
Lam Research Corporation
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