Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate
2011-04-19
2011-04-19
Le, Thao X (Department: 2892)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Physical stress responsive
C257SE21106, C257SE21131, C257SE21582, C257SE23010, C257SE23025, C257SE23164, C257SE23165, C257SE51040, C257SE51038
Reexamination Certificate
active
07927905
ABSTRACT:
A stress-engineered microspring is formed generally in the plane of a substrate. A nanowire (or equivalently, a nanotube) is formed at the tip thereof, also in the plane of the substrate. Once formed, the length of the nanowire may be defined, for example photolithographically. A sacrificial layer underlying the microspring may then be removed, allowing the engineered stresses in the microspring to cause the structure to bend out of plane, elevating the nanowire off the substrate and out of plane. Use of the nanowire as a contact is thereby provided. The nanowire may be clamped at the tip of the microspring for added robustness. The nanowire may be coated during the formation process to provide additional functionality of the final device.
REFERENCES:
patent: 5314569 (1994-05-01), Pribat et al.
patent: 5858862 (1999-01-01), Westwater et al.
patent: 5944537 (1999-08-01), Smith et al.
patent: 5979892 (1999-11-01), Smith
patent: 6184065 (2001-02-01), Smith et al.
patent: 6184699 (2001-02-01), Smith et al.
patent: 6213789 (2001-04-01), Chua et al.
patent: 6264477 (2001-07-01), Smith et al.
patent: 6297063 (2001-10-01), Brown et al.
patent: 6392524 (2002-05-01), Biegelsen et al.
patent: 6396677 (2002-05-01), Chua et al.
patent: 6439898 (2002-08-01), Chua et al.
patent: 6560861 (2003-05-01), Fork et al.
patent: 6582989 (2003-06-01), Biegelsen et al.
patent: 6646533 (2003-11-01), Biegelson et al.
patent: 6684499 (2004-02-01), Romano et al.
patent: 6755956 (2004-06-01), Lee et al.
patent: 6777963 (2004-08-01), Rutten
patent: 6856225 (2005-02-01), Chua et al.
patent: 6922327 (2005-07-01), Chua et al.
patent: 6947291 (2005-09-01), Chua et al.
patent: 6958572 (2005-10-01), Merkulov et al.
patent: 7000315 (2006-02-01), Chua et al.
patent: 7022541 (2006-04-01), Yenilmez et al.
patent: 7033647 (2006-04-01), Tang et al.
patent: 7067098 (2006-06-01), Colbert et al.
patent: 7208094 (2007-04-01), Islam et al.
patent: 7284324 (2007-10-01), Chua et al.
patent: 7301199 (2007-11-01), Lieber et al.
patent: 7307271 (2007-12-01), Islam et al.
patent: 7408186 (2008-08-01), Merkulov et al.
patent: 7444856 (2008-11-01), Prinz et al.
patent: 7465954 (2008-12-01), Kamins et al.
patent: 7528002 (2009-05-01), Samuelson et al.
patent: 7560366 (2009-07-01), Romano et al.
patent: 7635867 (2009-12-01), Graham et al.
patent: 7804157 (2010-09-01), Sharma et al.
patent: 2002/0046953 (2002-04-01), Lee et al.
patent: 2002/0122766 (2002-09-01), Lieber et al.
patent: 2004/0075464 (2004-04-01), Samuelson et al.
patent: 2004/0134265 (2004-07-01), Mancevski
patent: 2005/0017171 (2005-01-01), Samuelson et al.
patent: 2005/0133254 (2005-06-01), Tsakalakos
patent: 2005/0133476 (2005-06-01), Islam et al.
patent: 2005/0161662 (2005-07-01), Majumdar et al.
patent: 2006/0019472 (2006-01-01), Pan et al.
patent: 2006/0086314 (2006-04-01), Zhang et al.
patent: 2006/0213259 (2006-09-01), Prinz et al.
patent: 2006/0226550 (2006-10-01), Dai et al.
patent: 2006/0243483 (2006-11-01), Kirby et al.
patent: 2007/0186628 (2007-08-01), Curry et al.
patent: 2007/0228583 (2007-10-01), Islam et al.
patent: 2008/0272299 (2008-11-01), Jin et al.
patent: 1069588 (2001-01-01), None
patent: 1557843 (2005-07-01), None
patent: WO2004102582 (2004-11-01), None
R. He, D. Gao, R. Fan, A. I. Hochbaum, C. Carraro, R. Maboudian, and P. Yang, “Si Nanowire Bridges in Microtrenches: Integration of Growth into Device Fabrication,” Advanced Materials, vol. 17, pp. 2098 2102, 2005.
E. Yenilmez, Q. Wang, R. J. Chen, D. Wang, and H. Dai, “Wafer scale production of carbon nanotube scanning probe tips for atomic force microscopy,” Applied Physics Letters, vol. 80, pp. 2225-2227, 2002.
A. B. H. Tay and J. T. L. Thong, “High-resolution nanowire atomic force microscope probe grown by a field-emission induced process,” Applied Physics Letters, vol. 84, pp. 5207-5209, 2004.
C. Oon and J. Thong, “In situ nanowire growth for electrical interconnects,” Nanotechnology, vol. 15, pp. 687-691, 2004.
M. J. Vasile, D. A. Grigg, J. E. Griffith, E. A. Fitzgerald, and P. E. Russell, “Scanning probe tips formed by focused ion beams [IC testing application] ,” Review of Scientific Instruments, vol. 62, pp. 2167-2171, 1991.
D. J. Keller and C., Chih-Chung, “Imaging steep, high structures by scanning force microscopy with electron beam deposited tips,” Surface Science, vol. 268, pp. 333-339, 1992.
A. Knoll, P. Bachtold, J. Bonan, G. Cherubini, M. Despont, U. Dreschsler, U. Durig, B. Gotsmann, W. Haberle, C. Hagleitner, D. Jubin, M. A. Lantz, A. Pantazi, H. Pozidis, H. Rothuizen, A. Sebastian, R. Stutz, P. Vettiger, D. Wiesmann, and E. S. Eleftheriou, “Integrating nanotechnology into a working storage device,”Microelectronic Engineering, vol. 83, pp. 1692-1697, 2006.
J. Im, M. Lee, S. Myung, L. Huang, S. G. Rao, D. J. Lee, J. Koh, and S. Hong, “Directed assembly of single-walled carbon nanotubes using self-assembled monolayer patterns comprising conjugated molecular wires,” Nanotechnology, vol. 17, pp. 3569-3573, 2006.
A. Subramanian, B. J. Nelson, L. Dong, and D. Bell, “Dielectrophoretic nanoassembly of individual carbon nanotubes onto nanoelectrodes,” presented at 2005 IEEE International Symposium on Assembly and Task Planning (ISATP), Jul. 19-21, 2005, Montreal, Que., Canada, 2005.
Y. H. Yan, S. Li, L. Q. Chen, M. B. Chan-Park, and Q. Zhang, “Large-scale submicron horizontally aligned single-walled carbon nanotube surface arrays on various substrates produced by a fluidic assembly method,” Nanotechnology, vol. 17, pp. 5696-5701, 2006.
Z. F. Ren, Z. P. Huang, J. W. Xu, J. H. Wang, P. Bush, M. P. Siegal, and P. N. Provencio, “Synthesis of large arrays of well-aligned carbon nanotubes on glass,” Science, vol. 282, pp. 1105-1107, 1998.
N. A. Kouklin, W. E. Kim, A. D. Lazareck, and J. M. Xu, “Carbon nanotube probes for single-cell experimentation and assays,” Applied Physics Letters, vol. 87, pp. 173901-1, 2005.
www.nanochipinc.com/tech.htm, website Copyright 1999-2010.
Chow Eugene Michael
Qi Pengfei
Jones Eric W
Le Thao X
Palo Alto Research Center Incorporated
Small Jonathan A.
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