Method of producing low voltage field emission cathode structure

Details Method of producing low voltage field emission cathode structure Method of producing low voltage field emission cathode structure

1979-06-14

1981-03-03

Lazarus, Richard B.

Metal working

Barrier layer or semiconductor device making

Barrier layer device making

313309, H01J 902, H01J 912

Patent

active

042532213

ABSTRACT:
A method of making a low voltage field device utilizing a preferentially etched unidirectionally solidified composite as the substrate. In the process, the composite is etched so that the electrically conducting rod-like or fiber phase protrudes above the matrix phase. The tip of the exposed fiber phase may be processed further to provide a rounded or needle-like geometry. Next, a layer of insulating material is deposited in a direction approximately parallel to the axes of the fibers to cause the formation of cone-like deposits of insulating material on the fiber tips which shadow the deposit on the matrix around the fibers and produce conical holes in the layer of insulating material about the fibers. Then, an electrically conductive film is deposited in approximately the same direction to produce on the insulating layer a cellular grid having openings corresponding in number and distribution to the fiber sites. Lastly, the cones of insulating material are removed from the fibers.

REFERENCES:
patent: 3789471 (1974-02-01), Spindt et al.
patent: 3812559 (1974-05-01), Spindt et al.
patent: 3840955 (1974-10-01), Hagood et al.
patent: 4163949 (1979-08-01), Shelton

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