Method of producing lambda/4-shifted diffraction grating

Details Method of producing lambda/4-shifted diffraction grating Method of producing lambda/4-shifted diffraction grating

1995-03-08

1996-09-03

Powell, William

Etching a substrate: processes

Etching of semiconductor material to produce an article...

216 24, 216 41, B44C 122

Patent

active

055515843

ABSTRACT:
In a method of producing a .lambda./4-shifted diffraction grating, an image reversible resist is deposited on a substrate, the image reversible resist is exposed to an interference pattern having an intensity so that the resist is not dissolved when developed, the resist on a first region of the substrate is exposed to an interference light pattern so that only portions of the resist exposed to crests of a light intensity pattern in the interference exposure process are dissolved when developed, the resist on the first region is developed, portions of the resist on the first region remaining after the developing are exposed so that image reversal occurs in these portions when subjected to image reversal baking, the resist on a second region of the substrate is exposed to an interference light pattern so that only portions of the resist exposed opposite crests of a light intensity pattern are image reversed when subjected to image reversal baking, the resist on the first and second regions is subjected to image reversal baking, and the resist on the first and second regions is exposed and developed to remove portions in which image reversal did not occur, thereby forming a mask for a .lambda./4-shifted diffraction grating to be formed in the substrate.

REFERENCES:
patent: 5024726 (1991-06-01), Fujiwara
patent: 5225039 (1993-07-01), Ohguri
patent: 5236811 (1993-08-01), Fujiwara

Affiliated with

Also associated with

Rating

Method of producing lambda/4-shifted diffraction grating does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of producing lambda/4-shifted diffraction grating, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of producing lambda/4-shifted diffraction grating will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1945866