Method of producing integrated optical waveguide circuits and ci

Details Method of producing integrated optical waveguide circuits and ci Method of producing integrated optical waveguide circuits and ci

1981-11-09

1983-05-17

Hoffman, James R.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

350 9611, 427 38, 427 39, 427163, 427167, G02B 5174, B05D 312

Patent

active

043840388

ABSTRACT:
Optical waveguide circuits, such as signal splitters, can be produced by etching grooves in a transparent, glass substrate and by filling the grooves with glass having a higher refractive index than the material of the substrate. The grooves have a semicircular cross-section and the filling glass is produced by a low temperature plasma-activated chemical vapor deposition process. Two substrates can be placed on top of each other, with the surfaces in which the filled grooves have been provided in contact, to form an integrated optical circuit.

REFERENCES:
patent: Re30635 (1981-06-01), Kuppers et al.
patent: 4296143 (1981-10-01), Franken et al.

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