Method of producing filaments

Details Method of producing filaments Method of producing filaments

1987-12-09

1989-07-18

Lacey, David L.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156653, 156657, 437228, 437233, H01L 21306, C23F 102

Patent

active

048490695

ABSTRACT:
A method of producing filaments of sub-micron cross-sectional dimensions including the steps of obtaining a substrate having a base and a delineating layer on the base and a step in a surface of the delineating layer, providing a layer of a material from which the filament is to be formed on the surface which replicates the step in the surface, anisotropically etching the layer of filament material in the direction of the surface so as to leave a filament of the material adjacent the step, and removing the delineating layer to wholly or partially separate the filament from the substrate.

REFERENCES:
patent: 4358340 (1982-11-01), Fu
patent: 4389429 (1983-06-01), Soclof
patent: 4442589 (1984-04-01), Doo et al.
patent: 4508579 (1985-04-01), Goth et al.
patent: 4648937 (1987-03-01), Ogura et al.

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