Method of producing echelette gratings

Details Method of producing echelette gratings Method of producing echelette gratings

1976-12-15

1978-12-26

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156659, 156662, 156668, 204192E, H01L 21306, B44C 122, C03C 15100, C03C 2506

Patent

active

041315065

ABSTRACT:
Disclosed is a method of producing echelette gratings using a beam of electrically charged particles to bomber a masked substrate. The shape and blazed angle ".delta." of the echelette grating is controlled by putting the substrate at a selected slant angle ".theta." with regard to the beam of electrically charged particles.

REFERENCES:
patent: 3733258 (1973-05-01), Hanak et al.
patent: 3860783 (1975-01-01), Schmidt et al.
patent: 4016062 (1977-04-01), Mehta et al.
patent: 4056395 (1977-11-01), Sato et al.

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