Method of producing device having minute structure

Details Method of producing device having minute structure Method of producing device having minute structure

1995-06-27

1998-03-24

Bowers, Jr., Charles L.

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

438 51, 438 52, 438 53, 438114, 427230, 427384, B05D 722

Patent

active

057312290

ABSTRACT:
A method of producing a device having a minute structure such as a semiconductor element. The producing method comprises the following steps: (a) forming a film of liquid containing a sublimable material on a surface of a product of the device, the sublimable material being solid ordinary temperature and at normal pressure, the minute structure being formed at the surface of the product; (b) improving a wettability of at least one of the minute structure and a region surrounding the minute structure by the liquid film of the sublimable material; (c) converting the liquid film into a state containing the sublimable material in solid phase so as to form a protective film; and (d) vaporizing the protective film to be removed.

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