Method of producing a slab type two-dimensional photonic...

Details Method of producing a slab type two-dimensional photonic... Method of producing a slab type two-dimensional photonic...

2011-08-23

2011-08-23

Norton, Nadine G (Department: 1713)

Etching a substrate: processes

Forming or treating optical article

C438S689000, C385S129000

Reexamination Certificate

active

08002998

ABSTRACT:
A first main face of a substrate of a dielectric single crystal is etched to form recesses in the substrate. A second main face of the substrate is mechanically processed to form a slab, so that the recesses pass through the substrate to form through holes.

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