Method of producing a passive optical device including at least

Details Method of producing a passive optical device including at least Method of producing a passive optical device including at least

1987-04-01

1988-11-15

Dees, Jose G.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

430967, 378 34, 350 9619, 370 3, G03C 500

Patent

active

047849355

ABSTRACT:
A method of producing a passive optical device having optical components including at least one reflection grating, at least one port for polychromatic light and a plurality of ports for monochromatic light. The method includes producing the optical components of the device utilizing X-ray depth lithography so that the grating lines of the reflection grating are parallel to the direction of X-ray radiation emitted as part of the X-ray depth lithography.

REFERENCES:
patent: 4622663 (1986-11-01), Ishikawa et al.
patent: 4739501 (1988-04-01), Fussganger
patent: 4740951 (1988-04-01), Lizet et al.
SPIE, vol. 503, Application, Theory and Fabrication of Periodic Structures, 1984, "Wavelength Division Multiplexing/Demultiplexing (WDM) . . . ", Laude et al.
Optical Society of America Optics Letters, Dec. 1981, vol. 6, No. 12, pp. 639-641, "Planar Rowland Spectrometer For Fiber-Optic Wavelength . . . ".
Kernforschungszentrum Karlsruhe Manual No. KfK 3995 of Nov. 1985, "Herstellung von Mikrostrukturen mit grossem Aspektverhaltnis . . . ", Becker et al.

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