Method of producing a diaphragm on a substrate

Details Method of producing a diaphragm on a substrate Method of producing a diaphragm on a substrate

1987-12-09

1989-07-18

Lacey, David L.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156644, 156662, 437228, 437233, 437927, 437968, 357 26, 296211, H01L 2984

Patent

active

048490504

ABSTRACT:
The invention provides a method of producing on a substrate a diaphragm which is electrically isolated from the substrate. The method comprises obtaining a substrate (2) having a diaphragm(1) thereon which comprises a flexible central portion (1a) and a shouldered peripheral portion which supports the central portion (1a) above the substrate (2), applying a mask (6) over at least a part of the central portion (1a) and converting the unmasked portion (1b) of the diaphragm to a dielectric so as to electrically isolate the masked central portion (1a) of the diaphragm from the substrate (2).

REFERENCES:
patent: 4592238 (1986-06-01), Busta

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