Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates
Reexamination Certificate
2006-09-05
2006-09-05
Smith, Bradley K. (Department: 2891)
Semiconductor device manufacturing: process
Bonding of plural semiconductor substrates
C438S618000, C257SE21505
Reexamination Certificate
active
07101773
ABSTRACT:
The present invention relates to a process for making a contact point (8) on the rear surface of a component including at least one first substrate (10) with at least one active region (12) and at least one second substrate (20) for protecting the active region. In accordance with the invention, a second substrate of a non-insulating material is used and at least one through insulation trench (21) is made in it surrounding a part (22) of this substrate, said part being in contact with the active region when the first and second substrates are assembled.Application to sensor conditioning.
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International Search Report, for International Application No. PCT/FR02/03225, date mailed Sep. 23, 2003.
Commissariat a l''Energie Atomique
Smith Bradley K.
Thelen Reid & Priest LLP
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