Method of producing a calibration disk

Details Method of producing a calibration disk Method of producing a calibration disk

1998-12-04

2000-09-12

McPherson, John A.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

430945, G03C 516

Patent

active

061176206

ABSTRACT:
A method of making a calibration disk for a laser based inspection tool (LIT) for inspecting planar surfaces is described. The calibration disk has a plurality of overlapping bumps forming a circular ring with a width of one bump. The circular ring of bumps forms a feature of a known width and position on a disk which can be used to adjust one or more LIT's to yield calibrated results. The ring of overlapping bumps is preferably formed by rotating a disk substrate under a stationary pulsing laser beam.

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