Method of processing vertical cross-section using atomic...

Measuring and testing – Surface and cutting edge testing – Roughness

Reexamination Certificate

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C250S306000, C250S307000, C250S442110, C029S407050, C029S426500, C029S426600, C073S104000

Reexamination Certificate

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11135075

ABSTRACT:
An indentation is formed by thrusting a probe of a scanning probe microscope for processing, which has a vertical surface or a vertical ridge and is harder than sample material, into sample for measuring the indentation. A high-fidelity AFM observation is performed on the shape of the formed indentation with a thin probe with high aspect ratio, the direction of the vertical surface or the vertical ridge is inspected, and the angle error θ is stored. By rotating a sample stage by an angle corresponding to the measured mounting angle error θ of the probe, the mounting angle error of the probe is corrected in advance.

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