Method of processing an optical substrate

Details Method of processing an optical substrate Method of processing an optical substrate

2007-01-23

2007-01-23

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

11230455

ABSTRACT:
A method of processing an optical substrate having a convex surface comprises an interferometric measurement using a beam of diverging measuring light traversing the substrate and reflected from a concave mirror.

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J.E. Greivenkamp, et al., “Phase Shifting Interferometry”, Optical Shop Testing, Second Edition, Edited by Daniel Malacara, Chapter 14.1 to 14.3, 1992, pp. 501-507.

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