Method of processing an optical element using an...

Details Method of processing an optical element using an... Method of processing an optical element using an...

2003-11-26

2008-03-11

Connolly, Patrick (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07342667

ABSTRACT:
A method of processing an optical element having a spherical surface comprises providing a first interferometer apparatus having an interferometer optics with an aspherical lens for transforming a beam of a first spherical beam type into a beam of a second spherical beam type, arranging the optical element in a beam path of an incident beam provided by the interferometer optics, interferometrically taking a first measurement of the optical element, and determining first deviations of the spherical surface. The method further comprises arranging the aspherical lens in a beam path of a measuring beam provided by a beam source of a second interferometer apparatus, wherein the measuring beam is one of the first spherical type and the second spherical type, interferometrically taking a second measurement using the measuring beam, and determining second deviations of an aspherical surface of the aspherical lens.

REFERENCES:
patent: 4340306 (1982-07-01), Balasubramanian
patent: 4468122 (1984-08-01), Puryaev
patent: 4697927 (1987-10-01), Ono
patent: 4732483 (1988-03-01), Biegen
patent: 5361312 (1994-11-01), Kuchel
patent: 5416586 (1995-05-01), Tronolone et al.
patent: 5473434 (1995-12-01), de Groot
patent: 5488477 (1996-01-01), de Groot
patent: 5548403 (1996-08-01), Sommargren
patent: 5777741 (1998-07-01), Deck
patent: 5982490 (1999-11-01), Ichikawa et al.
patent: 6312373 (2001-11-01), Ichihara
patent: 6781700 (2004-08-01), Kuchel
patent: 2002/0063867 (2002-05-01), Otto
patent: 2003/0002048 (2003-01-01), Zanoni
Patrick P. Naulleau, et al., “Extreme-Ultraviolet Phase-Shifting Point-Diffraction Interferometer: A Wave-Front Metrology Tool with Subangstrom Reference-Wave Accuracy,” Applied Optics, vol. 38, No. 35, Dec. 10, 1999, pp. 7252-7263, Optical Society of America.
Daniel Malacara, Ed., “Optical Shop Testing,” Second Edition, 1992, Chapter 1.2, pp. 18-49, John Wiley & Sons, Inc., New York.
Daniel Malacara, Ed., “Optical Shop Testing,” Second Edition, 1992, Chapter 2.1, pp. 51-53, John Wiley & Sons, Inc., New York.
Daniel Malacara, Ed., “Optical Shop Testing,” Second Edition, 1992, Chapter 2.6, pp. 73-77, John Wiley & Sons, Inc., New York.

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