Method of processing a semiconductor device

Details Method of processing a semiconductor device Method of processing a semiconductor device

1998-04-13

2000-04-11

Fulton, Christopher W.

Geometrical instruments

Gauge

Collocating

33613, 414935, G01B 731, B23Q 300

Patent

active

060474807

ABSTRACT:
Alignment of a blade (60) to an electrostatic chuck (53) is accomplished using an alignment tool (30) and an alignment pin (40) to align a port (534) in the electrostatic chuck (53) directly to a hole (602) in the blade (60). Placement of a substrate (70) in a processing chamber (50) is accomplished using a substrate handler configured with the blade (60) to place the substrate (70) accurately on the electrostatic chuck (53). The substrate (70) is then processed in the processing chamber (50) using the electrostatic chuck (53).

REFERENCES:
patent: 3097434 (1963-07-01), Diamond
patent: 4670981 (1987-06-01), Kubota et al.
patent: 4700488 (1987-10-01), Curti
patent: 4805316 (1989-02-01), Curti
patent: 4934064 (1990-06-01), Yamaguchi et al.

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