Method of preventing pinhole defects through co-polymerization

Details Method of preventing pinhole defects through co-polymerization Method of preventing pinhole defects through co-polymerization

2005-01-05

2009-12-15

Chea, Thorl (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Including heating

C430S270100, C430S271100, C430S273100, C430S276100, C430S935000

Reexamination Certificate

active

07632631

ABSTRACT:
A method is provided for forming a stable thin film on a substrate. The method includes depositing a co-polymer composition having a first component and a second component onto a substrate to form a stable film having a first thickness. The first component has first dielectric properties not enabling the first component by itself to produce the stable film having the first thickness. However, the second component has second dielectric properties which impart stability to the film at the first thickness. In a preferred embodiment, the second component includes a leaving group, and the method further includes first thermal processing the film to cause a solvent but not the leaving group to be removed from the film, after which second thermal processing is performed to at least substantially remove the leaving group from the film. As a result, the film is reduced to a second thickness smaller than the first thickness, and the film remains stable during both the first and the second thermal processing.

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D. Taylor et al., “Measuring and Accessing Printability of Reticle Pinhole Defects,” Proc. SPIE (18th Europ. Conf. On Mask Technology for Integrated Circuits and Microcomponents, vol. 4764, pp. 202-209 (2002) (Abstract Only).
G. Reiter, et al., “Thin Film Instability Induced By Long Range Forces,” Langmuir, vol. 15 pp. 2551-2558 (1999).
R. Seemann,, et al. “Dewetting Patterns and Molecular Forces: A Reconciliation,” Physical Review Letters vol. 86, No. 24, pp. 5534-5537 (2001).
S. Nir, “Van Der Waals Interactions Between Surfaces of Biological Interest,” Progress In Surface Science, vol. 8 No. 1, pp. 1-58 (1976).

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