Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1981-03-27
1983-04-19
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
134 3, 134 28, 134 29, 156636, 156638, 156903, 252 791, 252 793, 252 794, 252 795, C03C 1500, H01L 21306, C03C 2506
Patent
active
043804900
ABSTRACT:
A method of treating semiconductor surfaces to produce an abrupt dielectric discontinuity between the semiconductor bulk and the ambient is described.
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RCA Review, vol. 39, Jun. 1978, Chemical Etching of Silicon, Germanium, Gallium Arsenide, and Gallium Phosphide by W. Kern, pp. 278-308.
Journal of the Electrochemical Society, vol. 123, No. 12, Dec. 1976, Chemical Etching of Silicon by B. Schwartz et al., pp. 1903-1909.
Aspnes David E.
Studna Ambrose A.
Bell Telephone Laboratories Incorporated
Laumann Richard D.
Powell William A.
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