Semiconductor device manufacturing: process – Miscellaneous
Reexamination Certificate
2006-12-22
2010-02-16
Vu, David (Department: 2818)
Semiconductor device manufacturing: process
Miscellaneous
C977S742000
Reexamination Certificate
active
07662732
ABSTRACT:
A method of preparing a patterned carbon nanotube array a patterned carbon nanotube array prepared thereby are provided. The method includes forming carbon nanotubes in channels of porous templates, arranging the templates in a predetermined pattern on a substrate and selectively removing the templates to expose the carbon nanotubes.
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Choi Jae Young
Choi Seong Jae
Seol Kwang Soo
Yi Dong Kee
Yoon Seon Mi
Cantor & Colburn LLP
Chi Suberr
Samsung Electronics Co,. Ltd.
Vu David
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