Method of preparing components, prepared component,...

Details Method of preparing components, prepared component,... Method of preparing components, prepared component,...

2004-05-07

2011-12-13

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C310S012060

Reexamination Certificate

active

08077287

ABSTRACT:
A method of preparing components for use in a vacuum chamber of a lithographic apparatus is disclosed. The method includes coating the component with a non-metallic material. The method may further include treating the coating so as to harden the coating. Preferably, the coating material is a hydrogen silsesquioxane (HSQ), which may be applied via spraying, brushing, or spinning and can be treated by heating or by irradiation with an electron beam. The resulting components strongly reduce outgassing of water and hydrocarbons when subjected to a vacuum environment.

REFERENCES:
patent: 4040874 (1977-08-01), Yerman
patent: 5357158 (1994-10-01), Takei
patent: 5370903 (1994-12-01), Mine et al.
patent: 5439849 (1995-08-01), McBride et al.
patent: 5549934 (1996-08-01), Garza et al.
patent: 5609925 (1997-03-01), Camilletti et al.
patent: 5989983 (1999-11-01), Goo et al.
patent: 6031598 (2000-02-01), Tichenor et al.
patent: 6114781 (2000-09-01), Hazelton et al.
patent: 6271606 (2001-08-01), Hazelton
patent: 6296806 (2001-10-01), Kishkovich et al.
patent: 6319859 (2001-11-01), Tran
patent: 7183674 (2007-02-01), Koorneef et al.
patent: 2002/0011182 (2002-01-01), Matsuda et al.
patent: 2002/0018195 (2002-02-01), Iwamoto et al.
patent: 2002/0145808 (2002-10-01), Freitag et al.
patent: 2003/0141769 (2003-07-01), Kubo
patent: 2003/0227079 (2003-12-01), Chia et al.
patent: 2004/0080217 (2004-04-01), Ota et al.
patent: 2004/0115855 (2004-06-01), Tanenbaum et al.
patent: 2005/0213060 (2005-09-01), Duisters et al.
patent: 1 204 002 (2002-05-01), None
patent: 1 233 501 (2002-08-01), None
patent: 1 204 002 (2003-03-01), None
patent: 06039959 (1994-02-01), None
patent: 06267486 (1994-09-01), None
patent: 200315645 (2000-11-01), None
patent: 2001-153140 (2001-06-01), None
patent: 2002272086 (2002-09-01), None
patent: WO 00/13223 (2000-03-01), None
Translation of JP application 2001-07899, filed Mar. 13, 2001.
Translation of Taiwanese Official Action for ROC (Taiwan) Patent Application No. 093112968, dated Feb. 6, 2006.
Translation of Japanese Official Action, dated Jul. 1, 2005.

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