Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1981-06-24
1982-10-19
Massie, Jerome W.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156649, 156652, 156655, 156662, H01L 21308
Patent
active
043548989
ABSTRACT:
Highly reproducible, optically flat mirror facets are created by contacting a predetermined area of the InGaAsP/InP heterostructure system with a chemical etchant for a time period sufficient to expose a substantially vertical crystallographic surface throughout the entire heterostructure system. Contact of the exposed surface with HCl causes a preferred crystallographic plane to be exposed as an optically flat mirror facet.
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patent: 4285763 (1981-08-01), Coldren
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S. Arai et al., "New 1.6 .mu.m Wavelength GaInAsP/InP Burial Heterostructure Lasers," Electronics Letters, vol. 16, p. 349 (5/80).
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Coldren Larry A.
Furuya Kazuhito
Bell Telephone Laboratories Incorporated
Massie Jerome W.
Ranieri Gregory C.
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