Photocopying – Projection printing and copying cameras – Methods
Reexamination Certificate
2007-06-27
2008-10-21
Rutledge, Della J. (Department: 2851)
Photocopying
Projection printing and copying cameras
Methods
Reexamination Certificate
active
07440082
ABSTRACT:
A method for generating models for simulating the imaging performance of a plurality of exposure tools. The method includes the steps of: generating a calibrated model for a first exposure tool capable of estimating an image to be produced by the first exposure tool for a given photolithography process, where the calibrated model includes a first set of basis functions; generating a model of a second exposure tool capable of estimating an image to be produced by the second exposure tool for the photolithography process, where the model includes a second set of basis functions; and representing the second set of basis functions as a linear combination of the first set of basis functions so as to generate an equivalent model function corresponding to the second exposure tool, where the equivalent model function produces a simulated image corresponding to the image generated by the second exposure tool for the photolithography process.
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Chen Jang Fung
Shi Xuelong
ASML Masktools B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Rutledge Della J.
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