Method of precision measurements of sizes and line width...

Details Method of precision measurements of sizes and line width... Method of precision measurements of sizes and line width...

2005-10-06

2008-09-23

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S306000, C250S311000, C250S310000

Reexamination Certificate

active

07427756

ABSTRACT:
A novel method of precision measurements of sizes and line width roughness of small objects in accordance with their images obtained in scanning electron microscope, which is improvement of the existing methods and which realizes the new strategy of the measurements. This method has a higher stability with respect to noises of the video signal.

REFERENCES:
patent: 4670652 (1987-06-01), Ichihashi et al.

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