Method of polishing and figuring diamond and other superhard mat

Details Method of polishing and figuring diamond and other superhard mat Method of polishing and figuring diamond and other superhard mat

1994-05-10

1995-10-17

Fiorilla, Christopher A.

Plastic and nonmetallic article shaping or treating: processes

Laser ablative shaping or piercing

B29C 7104

Patent

active

054588278

ABSTRACT:
A method of shaping and polishing the surface of a polycrystalline diamond including the steps of diffusion smoothing the diamond surface with hot reactive metals, shaping the smoothed diamond surface by laser ablation using a pulsed laser beam, and ion-beam assisted polishing the ablated diamond surface to optical smoothness. The polished diamond can be used for high quality optics.

REFERENCES:
patent: 4188122 (1980-02-01), Massie et al.
patent: 4498773 (1985-02-01), Von Bieren
patent: 5154023 (1992-10-01), Sioshansi
S. M. Pimenov et al., "UV laser processing of diamond films: effects of irradiation conditions on the properties of laser treated diamond film surfaces," Diamond and Related Materials 2(1993) 291-297.
Yoshikawa, "Development and performance of a diamond film polishing apparatus with hot metals," SPIE vol. 1325 Diamond Optics III (1990) p. 210.
Jin et al., "Shaping of diamond films by etching with molten rare-earth metals," AT&T Bell Laboratories.
Harker et al., "The Polishing of polycrystalline diamond films," SPIE vol. 1325 Diamond Optics III (1990) p. 222.
Thrope et al., "Growth, polishing, and optical scatter of diamond thin films," SPIE vol. 1325 Diamond Optics III (1990) p. 230.
Jin et al., "Massive thinning of diamond films by a diffusion process," Appl. Phys. Lett. 60(16) 20 Apr. 1992 (p. 1948).
Jin et al., "Polishing of CVD diamond by diffusional reaction with manganese powder" Diamond and Related Materials 01 (1992) 949-953.

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