Method of plating an interconnect metal onto a metal in VLSI dev

Details Method of plating an interconnect metal onto a metal in VLSI dev Method of plating an interconnect metal onto a metal in VLSI dev

1985-09-13

1986-10-28

Kittle, John E.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430314, 430315, 430316, 430317, 430318, 430319, 156642, 204 15, G03C 500

Patent

active

046198873

ABSTRACT:
A method of plating an interconnect or contact metal of higher conductivity than aluminum onto a metal layer in VLSI devices includes depositing a coating of insulator over the metal layer, patterning and etching the insulator coating into a mask of the reverse image of a desired lead pattern and then depositing the interconnect metal onto the exposed metal layer. Following depositing the insulator mask and underlaying metal is selectively removed.

REFERENCES:
patent: 4325780 (1982-04-01), Schulz, Jr.
Polyimide Liftoff Technology for High Density LSI Metallization, Homma et al, IEEE Transactions on Electron Devices, vol. Ed-28, No. 5, pp. 550-556, May 1981.
Liftoff of Thick Metal Layers Using Multilayer Resist, Lyman et al, J. Vac. Sci. Technol., 19(4), pp. 1325-1328, Nov./Dec. 1981.
Fabrication of Printed Circuits Without Undercutting of Conduction Lines, Lester et al, IBM Tech. Disc. Bull., vol. 9, No. 10, Mar., 1967, pp. 1258-1259.

Affiliated with

Also associated with

Rating

Method of plating an interconnect metal onto a metal in VLSI dev does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of plating an interconnect metal onto a metal in VLSI dev, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of plating an interconnect metal onto a metal in VLSI dev will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1346308