Radiant energy – Ionic separation or analysis – Cyclically varying ion selecting field means
Reexamination Certificate
2008-08-26
2010-12-07
Vanore, David A (Department: 2881)
Radiant energy
Ionic separation or analysis
Cyclically varying ion selecting field means
C250S281000, C250S282000, C250S288000, C250S492210, C438S513000, C438S706000, C438S710000
Reexamination Certificate
active
07847247
ABSTRACT:
A method of plasma particle simulation capable of preventing solution divergence. A space within a housing chamber of a plasma processing apparatus is divided into a plurality of cells. A weighting factor corresponding to the number of plasma particles represented by a superparticle is set in each of the divided cells. Superparticles are set in each of the divided cells using plasma particles contained in the divided cell and the set weighting factor. The behavior of the superparticles in each of the divided cells is calculated. The weighting factor becomes smaller as the divided cell is located closer to a solid wall surface of the housing chamber.
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Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
Vanore David A
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