Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2005-02-15
2005-02-15
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S068000
Reexamination Certificate
active
06856378
ABSTRACT:
A predictive method is used to compensate for intermediate batch sensitivities which inevitably occur during resist batch changeover. The compensation is applied to historical dose levels to arrive at a new dose level estimating an optimum dose. When the system discovers that a new batch of resist is loaded to a tool, historical data is used to calculate a reference dose for each tool. A batch factor is continuously calculated and using historical data along with the batch factor, a dose adjustment is made to maintain proper image size.
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Machia Keith J.
Nicholls Matthew C.
Parrish Charles J.
Schneider Craig E.
Whiting Charles A.
International Business Machines - Corporation
Nguyen Henry Hung
Sabo, Esq. William D.
Scully Scott Murphy & Presser
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