Method of photolithographic exposure dose control as a...

Photocopying – Projection printing and copying cameras – Illumination systems or details

Reexamination Certificate

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C355S068000

Reexamination Certificate

active

06856378

ABSTRACT:
A predictive method is used to compensate for intermediate batch sensitivities which inevitably occur during resist batch changeover. The compensation is applied to historical dose levels to arrive at a new dose level estimating an optimum dose. When the system discovers that a new batch of resist is loaded to a tool, historical data is used to calculate a reference dose for each tool. A batch factor is continuously calculated and using historical data along with the batch factor, a dose adjustment is made to maintain proper image size.

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R.E. Chappelow & M.R. Charney, Research Disclosure, Dec. 1987, No. 284, Kenneth Mason Publicati ns, Ltd., England, “Real Time Control of Photo Exposure Dose”.

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