Method of photographing electron microscope images on a single p

Details Method of photographing electron microscope images on a single p Method of photographing electron microscope images on a single p

1979-10-30

1982-02-16

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250311, G01N 2300

Patent

active

043160875

ABSTRACT:
This invention relates to a method and apparatus for obtaining a single photograph of electron microscope images, with low gain in magnification, of relatively thick specimen, which photograph is suitable for direct comparison with a corresponding photograph of the same specimen obtained with an optical microscope: wherein either the specimen or the electron beam is so manipulated that the electron beam passes discretely and stepwisely through sequential portions of the specimen, and prior to impinging on the photographic plate the electron beam is screened to eliminate any portion thereof which would produce aberrations or other distortion and is controllably directed to impinge on a portion of the photographic plate which corresponds to the portion of the specimen through which the beam is passing.

REFERENCES:
patent: 3225192 (1965-12-01), Katagiri et al.
patent: 3719776 (1973-03-01), Fujiyasu et al.
patent: 3774042 (1973-11-01), Engel
patent: 4031390 (1977-06-01), Muller et al.
patent: 4139668 (1979-02-01), Ward

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