Method of photoforming optical patterns for VLSI devices

Details Method of photoforming optical patterns for VLSI devices Method of photoforming optical patterns for VLSI devices

1985-08-23

1987-09-29

Kittle, John E.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430394, 430396, 350 9611, 350 9618, 350 9624, 350 9625, G03C 500

Patent

active

046968890

ABSTRACT:
A branched fiber optic assembly having a trunk at one end is employed. Each original optical pattern is individually projected onto the input end of a respective coherent sub-bundle of the fiber optic device. The exiting light from the trunk of the fiber optic assembly is projected onto a single photosensitive surface, such as that of a photosensitized silicon wafer.

REFERENCES:
patent: 3016785 (1962-01-01), Kapany
patent: 3753607 (1973-08-01), Kitano et al.
patent: 4017962 (1977-04-01), Palmer

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